Silicon photodetector for integrated lithium niobate photonics
Silicon photodetector for integrated lithium niobate photonics
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DOI：
10.1063/1.5118901
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发表时间：
2019-09-16
影响因子：
4
通讯作者：
Loncar, Marko
中科院分区：
文献类型：
--
作者：
Desiatov, Boris;Loncar, Marko
我们展示了一个非晶硅光电探测器的集成与一个薄膜的锂离子电池的光子平台在可见光波长范围内工作。我们提出了这种金属-半导体-金属光电探测器的设计、制造、集成和实验表征的细节，该光电探测器在635 nm-850 nm波长范围内的宽光带宽上具有22 mA/W至37 mA/W的响应度。
We demonstrate the integration of an amorphous silicon photodetector with a thin film lithium niobate photonic platform operating in the visible wavelength range. We present the details of the design, fabrication, integration, and experimental characterization of this metal-semiconductor-metal photodetector that features a responsivity of 22 mA/W to 37 mA/W over the wide optical bandwidth spanning in the 635 nm-850 nm wavelength range.