Micro structuring of borosilicate glass by high-temperature micro-forming
Micro structuring of borosilicate glass by high-temperature micro-forming
复制标题
高温微成型硼硅酸盐玻璃的微结构
DOI：
10.1007/s00542-005-0074-y
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
T. Burkhardt
中科院分区：
文献类型：
--
作者：
A. Schubert;J. Edelmann;T. Burkhardt
介绍了一种新的工艺技术，该技术允许通过使用微结构化工具在高温下成形，对各种玻璃，特别是可粘结的硼硅酸盐玻璃（例如Pyrex®7740）进行直接微结构化。该技术和制造设备的基础上描述了一个成型的示范结构，并显示了应用和转移到工业制造的可能性。
A new process technology is presented which allows the direct micro structuring of various glasses, especially bondable borosilicate glass (e.g. Pyrex®7740), by means of forming at high temperatures with a micro-structured tool. The technology and fabrication equipment are described on the basis of a molded demonstration structure, and possibilities for application and transfer to industrial manufacturing are shown.