Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products
Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products
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DOI：
10.1002/adem.201700203
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发表时间：
2017-06
影响因子：
3.6
通讯作者：
Nguyen Van Toan;M. Toda;T. Hokama;T. Ono
中科院分区：
文献类型：
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作者：
Nguyen Van Toan;M. Toda;T. Hokama;T. Ono
这项工作报道了金属辅助化学蚀刻（MACE）工艺在硅悬臂上作为水分检测的后处理对硅柱进行图案化。虽然悬臂梁非常脆弱，但已经成功地证明了支柱结构在悬臂梁上的图案。悬臂梁上涂有吸水材料（如聚酰亚胺和介孔二氧化硅），可用作湿度传感器。它的弯曲是由于吸收水分子引起的表面应力变化。然而，悬臂梁的弯曲通常是在一个小的值。本文提出了表面有高纵横比柱的硅悬臂梁，期望在吸收水分子的过程中悬臂梁有较大的弯曲。水分检测利用的原理是，根据水蒸汽在其表面的凝结行为，柱堆叠在一起。
This work reports the patterning silicon pillars by metal‐assisted chemical etching (MACE) process as a post process on a silicon cantilever for a moisture detection. Although the cantilever is very fragile, the patterning of the pillar structures on the cantilever has been successfully demonstrated. The cantilever coated with a material absorbing water (such as polyimide and mesoporous silica) can use as a humidity sensor. Its bending is due to the surface stress change from water molecule absorption. However, the bending of the cantilever is usually at a small value. Here, the silicon cantilever with high aspect ratio pillars on its surface is proposed, which is expected for a larger bending of the cantilever during the water molecule absorption. The moisture detection utilizes the principle that the pillars stack together based upon the condensation behavior of a water vapor on their surfaces.