Phase transformation and residual stress probed by Raman spectroscopy in diamond-turned single crystal silicon
Phase transformation and residual stress probed by Raman spectroscopy in diamond-turned single crystal silicon
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DOI：
10.1243/09544054jem1161
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发表时间：
2008-09-01
期刊：
影响因子：
2.6
通讯作者：
Pizani, P. S.
中科院分区：
文献类型：
--
作者：
Jasinevicius, R. G.;Duduch, J. G.;Pizani, P. S.
单晶半导体单点金刚石车削是脆性材料加工中的一个重要研究领域。在不同的切削条件（进给量和切削深度）下，对（100）取向的单晶硅样品进行了金刚石车削。利用微拉曼光谱和原子力显微镜研究了金刚石在韧性和脆性模式下的结构变化和表面光洁度。结果表明，在延性加工模式下，硅发生相变。这种相变是由加工后产生的非晶表面层所证明的，这是由拉曼散射探测到的。对加工表面的残余压应力进行了估计，发现残余压应力随进给量和切削深度的增加而减小。这种行为归因于当进给速度大于或等于2.5 μ m/rev时形成的地下裂纹。观察到表面粗糙度随进给量和切削深度的变化而变化。当进给速度达到5.0 μ m/rev时，微裂纹的形成影响了表面粗糙度的增加。此外，基于拉曼光谱，讨论了工具/材料相互作用引起的高压相变，并对这种典型脆性材料的延性响应负责。这种加工技术的应用可用于各种高质量部件，例如为微流体装置创建微米范围通道以及在红外光谱范围内使用的微透镜。
Single-point diamond turning of monocrystalline semiconductors is an important field of research within brittle materials machining. Monocrystalline silicon samples with a (100) orientation have been diamond turned under different cutting conditions (feed rate and depth of cut). Micro-Raman spectroscopy and atomic force microscopy have been used to assess structural alterations and surface finish of the samples diamond turned under ductile and brittle modes. It was found that silicon undergoes a phase transformation when machined in the ductile mode. This phase transformation is evidenced by the creation of an amorphous surface layer after machining which has been probed by Raman scattering. Compressive residual stresses are estimated for the machined surface and it is observed that they decrease with an increase in the feed rate and depth of cut. This behaviour has been attributed to the formation of subsurface cracks when the feed rate is higher than or equal to 2.5 mu m/rev. The surface roughness was observed to vary with the feed rate and the depth of cut. An increase in the surface roughness was influenced by microcrack formation when the feed rate reached 5.0 mu m/rev. Furthermore, a high-pressure phase transformation induced by the tool/material interaction and responsible for the ductile response of this typical brittle material is discussed based upon the presented Raman spectra. The application of this machining technology finds use for a wide range of high quality components, for example the creation of a micrometre-range channel for microfluidic devices as well as microlenses used in the infrared spectrum range.