High purity β-FeSi2 formed on silicon(001) substrates by an vacuum Deposition method
High purity β-FeSi2 formed on silicon(001) substrates by an vacuum Deposition method
复制标题
真空沉积法在硅(001)衬底上形成高纯β-FeSi2
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
Makoto Ishii
中科院分区:
文献类型:
--
作者:
M.Ishii;S.Hanamura;T.Miyata;T.Minami;石井 恂;M.Ishii et al.;M.Ishii et al.;M.Ishii et al.;Makoto Ishii