Narrow-Strip Single-Longitudinal-Mode Laser Based on Periodic Anodes Defined by i-Line Lithography
Narrow-Strip Single-Longitudinal-Mode Laser Based on Periodic Anodes Defined by i-Line Lithography
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基于 i 线光刻定义的周期性阳极的窄带单纵模激光器
DOI：
10.1109/jphot.2018.2818170
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发表时间：
2018
影响因子：
2.4
通讯作者：
Wang Li-Jun
中科院分区：
文献类型：
--
作者：
Gao Feng;Qin Li;Chen Yong-Yi;Jia Peng;Chen Chao;Cheng Liwen;Chen Hong;Liang Lei;Zeng Yu-Gang;Zhang Xing;Ning Yong-Qiang;Wang Li-Jun
提出了一种低成本的无再生窄条单纵模半导体激光器，它基于仅由i线光刻限定的周期性阳极。利用表面绝缘沟槽分隔的周期性阳极作为44阶增益光栅，在不引入有效折射率耦合的情况下实现了高增益对比度。在980.63 nm波长下，单纵模连续输出功率达到100.9 mW/面，单端面功率转换效率达到18.6%，斜率效率为0.53 W/A。最高边模抑制比为45 dB，线宽低于889 MHz，350 mA。在慢轴上的光束参数乘积M${1，}^{2}$为1.85，实现了接近衍射极限的光束质量。首次提出了一种简单的表面光栅制作方法，该方法利用i线光刻技术一次定义出4 μ m宽的周期性表面沟槽作为波导脊，无需再生长、纳米级光栅制作或刻面涂覆。由于低成本的制造方法和良好的性能，我们的单纵模器件可以用于广泛的实际应用。
A low-cost regrowth-free narrow-strip single-longitudinal-mode diode laser, based on periodic anodes defined only by i-line lithography is proposed. With the periodic anodes separated by surface insulated grooves acting as a 44th-order gain grating, a high gain contrast is achieved without introducing effective index coupling. The CW output power of the device without facet coatings is up to 100.9 mW/facet at 980.63 nm in single-longitudinal-mode operation with a single facet having a power conversion efficiency of up to 18.6% and a slope efficiency of 0.53 W/A. The highest side-mode suppression ratio is 45 dB with a linewidth below 889 MHz, at 350 mA. The beam parameter product, M${\,}^{2}$, in the slow axis is 1.85, achieving a near diffraction-limited beam quality. A novel method for easy surface gratings fabrication is first presented, wherein, 4-μm-width periodic surface grooves, acting as waveguide ridges, are defined once by i-line lithography only without regrowth, nanoscale gratings fabrication, or facet coating. Owing to the low-cost fabrication methods and good performances, our single-longitudinal-mode devices can be used for widespread practical applications.