Development of a WO3 thick-film-based sensor for the detection of VOC
Development of a WO3 thick-film-based sensor for the detection of VOC
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DOI：
10.1016/j.snb.2005.01.038
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发表时间：
2005-07-22
影响因子：
8.4
通讯作者：
Maekawa, T
中科院分区：
文献类型：
--
作者：
Kanda, K;Maekawa, T
一种高灵敏度的气体传感器，用于检测芳烃已开发使用的WO 3厚膜，其中Pd和Pt作为催化剂施加到有限的和最敏感的区域的膜的体电阻的变化。制备了不同平均晶粒尺寸和膜厚的WO 3厚膜，研究了不同工作温度下薄膜对芳烃气体的吸收特性。在400 ℃下操作的膜的平均晶粒尺寸为85 nm，厚度为35 μ m，被认为是理想的检测目标气体。在10-1000 ppb的浓度范围内测量了甲苯、二甲苯、苯乙烯和间二甲苯，在0.1-500 ppm的浓度范围内测量了干扰气体，考察了传感器的灵敏度。该传感器对芳香烃气体具有极高的灵敏度，即使在10 ppb的浓度下，膜电阻的变化也超过2倍。相比之下，传感器对干扰气体的灵敏度非常低。(c)2005 Elsevier B. V.保留所有权利。
A highly sensitive gas sensor for the detection of aromatic hydrocarbons has been developed using a WO3 thick film where Pd and Pt were applied as catalyst to a limited and most sensitive area of the film to the change in bulk resistance. WO3 thick films with different mean grain size and film thickness were prepared to investigate characteristics of the films to aromatic hydrocarbon gases at various operating temperatures. The film operated at 400 degrees C with mean grain size of 85 run and thickness of 35 mu m was found to be ideal for the detecting target gases. The sensitivities of the sensor were investigated by measuring toluene, ethylbenzene, styrene and m-xylene at a concentration range of 10-1000 ppb and some of interference gases at a range of 0.1-500 ppm. The sensor showed extremely high sensitivities to the aromatic hydrocarbon gases, and the changes in the film resistance were more than two times even at concentration of 10 ppb. By contrast, the sensor showed very low sensitivity to the interference gases. (c) 2005 Elsevier B.V. All rights reserved.