Tunable Conformality of Polymer Coatings on High Aspect Ratio Features
Tunable Conformality of Polymer Coatings on High Aspect Ratio Features
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高纵横比特征上聚合物涂层的可调共形性
DOI：
10.1002/cvde.200906821
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发表时间：
2010
影响因子：
--
通讯作者：
K. Gleason
中科院分区：
文献类型：
--
作者：
G. Ozaydin;K. Gleason
在这项工作中，我们证明了存在于吸附到表面上的单体中的乙烯基键的浓度决定了通过引发（i）CVD在衬底拓扑结构上生长的聚合物膜所实现的保形度。对于不同纵横比的微沟槽，弹道模型将观察到的台阶覆盖率与引发自由基的粘附系数γ的范围（在0.01和0.05之间）相关联。增加单体的表面浓度导致更高的γ值。在所研究的沉积制度中，γ与自由基引发剂的浓度无关。此外，如果单体的表面浓度是固定的，γ对衬底温度是不敏感的。使用这一知识，共形覆盖微沟槽上的乙二醇二丙烯酸酯（EGDA）和甲基丙烯酸新戊酯（npMA）证明。此外，保形性允许对机械坚固且耐溶剂的iCVD生产的p（EGDA）交联聚合物的纳米管进行模板化。
In this work we demonstrate that the concentration of vinyl bonds present in monomers adsorbed onto the surface determines the degree of conformality achieved by polymeric films grown over substrate topology by initiated (i)CVD. For microtrenches of varying aspect ratio, a ballistic model correlates the observed step coverage to a range of sticking coefficients of the initiating radicals, γ, between 0.01 and 0.05. Increasing the surface concentration of the monomer results in higher values of γ. In the deposition regime studied, γ is independent of the concentration of radical initiators. Furthermore, γ is insensitive to substrate temperature if the surface concentration of monomer is fixed. Using this knowledge, conformal coverage on microtrenches is demonstrated from both ethylene glycol diacrylate (EGDA) and neopentyl methacrylate (npMA). Additionally, the conformality permits templating of nanotubes of the mechanically robust and solvent-resistant iCVD-produced p(EGDA) crosslinked polymer.