Hot embossing of microfluidic platform
Hot embossing of microfluidic platform
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DOI：
10.1016/j.icheatmasstransfer.2006.01.017
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发表时间：
2006-05-01
影响因子：
7
通讯作者：
Chien, RD
中科院分区：
文献类型：
--
作者：
Chien, RD
聚合物的微加工正变得越来越重要，并被认为是硅或玻璃基MEMS技术的低成本替代品。然而，大多数热压印研究都是在薄膜上进行的，可能无法满足产品的结构要求。在这项研究中，通过热压微成型微特征流体平台。在镍钴基印模中的微特征包括大约27 μ m深和110 μ m宽的微通道阵列。使用1mm厚的PMMA膜作为模塑基材。研究了成型条件对微特征复制精度的影响。对微通道的压印宽度、压印深度和侧壁拔模斜度进行了分析和关联。结果发现，所有的精度的压印深度，宽度和拔模角度增加与所施加的力，直到相关的尺寸达到饱和值。压印温度对压印深度和宽度精度的影响与压印力的影响相似。考虑到合理的周期时间，基本上，20kN的施加力和180摄氏度的压花温度可以达到可接受的结果。然而，如果所施加的力增加到25kN，伴随着200摄氏度的压花温度和5分钟的压花时间，可以获得几乎完美的复制。(c)2006爱思唯尔有限公司保留所有权利。
Microfabrications of polymer are becoming increasingly important and considered as a low-cost alternative to the silicon or glass-based MEMS technologies. However, most of hot embossing studies were done on a thin film that may not fulfill the structure requirement of the product. In this study, micromolding via hot embossing was applied to microfeatured fluidic platform. The microfeature in the Ni-Co-based stamp includes microchannel array of approximately 27 mu m in depth and 110 mu m in width. A PMMA film of 1 mm thickness was utilized as molding substrate. Effect of molding conditions on the replication accuracy of microfeatures was investigated. The imprint width, imprint depth and sidewall draft angle of microchannels were analyzed and correlated. It was found that all the accuracies of the imprint depth, width and draft angle increase with the applied force until the associated dimensions reach saturated values. Embossing temperature shows similar influence on the accuracies of imprint depth and width as the applied force. Basically, 20kN applied force and 180 degrees C embossing temperature can achieve acceptable results considering reasonable cycle time. However, if the applied force is increased to 25 kN accompanied with 200 degrees C embossing temperature and 5 min embossing time, one can obtain a nearly perfect replication. (c) 2006 Elsevier Ltd. All rights reserved.