Quality Factor Enhancement of Lateral Microresonators in Liquid Media by Hydrophobic Coating
Quality Factor Enhancement of Lateral Microresonators in Liquid Media by Hydrophobic Coating
复制标题
通过疏水涂层增强液体介质中横向微谐振器的品质因数
DOI：
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发表时间：
2011
影响因子：
2.7
通讯作者：
H. Kulah
中科院分区：
文献类型：
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作者：
D. Eroglu;H. Kulah
在这封信中，一种新的方法来提高品质因数的微谐振器在液体中。通过利用高度疏水的聚对二甲苯的共形涂覆薄层，我们将空气捕获在横向谐振器的窄间隙之间，并防止液体进入间隙，从而防止侧表面上的粘性阻尼增加。电容梳状驱动器的初始测试表明，当设备在聚对二甲苯涂层后在水中操作时，品质因数仅降低三倍（从157降低到55）。这种方法是非常有前途的液体谐振器的应用，特别是实时生物制剂检测，其中高品质因数是必不可少的高质量分辨率。
In this letter, a new method of improving the quality factor of microresonators inside liquids is presented. By utilizing a conformally coated thin layer of parylene, which is highly hydrophobic, we trap air between the narrow gaps of a lateral resonator and prevent liquids from entering the gaps, thus preventing the viscous damping increase on the side surfaces. Initial tests with capacitive comb drives show that the quality factor decreases only threefold (from 157 to 55) when the device is operated in water after parylene coating. This method is very promising for in-liquid resonator applications, particularly real-time bioagent detection where high quality factor is essential for high mass resolution.