Precision aspheric optics testing with SCOTS: a deflectometry approach

Precision aspheric optics testing with SCOTS: a deflectometry approach
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DOI:
10.1117/12.2020721
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发表时间:
2013-05
期刊:
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通讯作者:
P. Su;M. Khreishi;R. Huang;T. Su;J. Burge
P. Su;M. Khreishi;R. Huang;T. Su;J. Burge
中科院分区:
其他
文献类型:
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作者:
P. Su;M. Khreishi;R. Huang;T. Su;J. Burge

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用SCOTS/偏折法进行绝对测量是一个校准问题。我们使用激光跟踪仪来校准测试几何形状。用大口径巡天望远镜第三反射镜的初步测量结果验证了这种性能。相机的系统误差得到了严格控制。相机光瞳成像像差是用外部孔径光阑消除的。通过旋转测试抑制了成像像差和其他固有误差。结果表明,SCOT可以作为一种大动态范围、高精度、非零的精密非球面光学检测方法。SCOTS测试可以达到与传统干涉测试相当的测量精度。
Absolute measurement with SCOTS/deflectometry is a calibration problem. We use a laser tracker to calibrate the test geometry. The performance id demonstrated with the initial measurement results from the Large Synoptic Survey Telescope tertiary mirror. Systematic errors from the camera are carefully controlled. Camera pupil imaging aberration is removed with an external aperture stop. Imaging aberration and other inherent errors are suppressed with a rotation test. Results show that the SCOTS can act as a large dynamic range, high precision, non-null test method for precision aspheric optics. The SCOTS test can achieve measurement accuracy comparable with the traditional interferometric testing.