Ru-implanted WS2 nanosheet gas sensors to enhance sensing performance towards CO gas in self-heating mode
Ru-implanted WS2 nanosheet gas sensors to enhance sensing performance towards CO gas in self-heating mode
复制标题
植入 Ru 的 WS2 纳米片气体传感器可增强自加热模式下对 CO 气体的传感性能
DOI：
10.1016/j.snb.2022.132454
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
Saito Noriko
中科院分区：
文献类型：
--
作者：
Kim Jae-Hun;Sakaguchi Isao;Hishita Shunich;Ohsawa Takeo;Suzuki Taku T.;Saito Noriko
Ru注入（低剂量：研究了p型WS 2纳米片（NS）自加热CO气敏传感器的自加热模式。X射线光电子能谱分析表明，注入的Ru以Ru 3+（~ 38at%）和Ru 4+（~ 62at%）的形式存在。Ru离子注入后电阻率的降低归因于Ru 3+对W 4+的取代。Ru离子注入（2 × 1014 ions/cm 2）WS 2的传感器响应增强归因于Ru离子注入后氧在硫空位上的吸附增强。将Au纳米粒子修饰到该气敏元件上，不仅增强了对CO气体的响应，而且提高了气敏元件的选择性和动态特性。从Au的催化作用和溢出效应两个方面解释了相关的传感机理。优化后的气敏元件在相对湿度为60%时（Rg/Ra= 3 ~ 50 ppm CO，Ra为传感器在空气中的电阻，Rg为传感器在目标气体中的电阻）对CO有良好的响应。
Ru-implanted (low-dose: 2 ×1013ions/cm2and high-dose: 2 ×1014ions/cm2)p-type WS2nanosheet (NS) gas sensors were investigated for CO gas sensing in self-heating mode. X-ray photoelectron spectroscopic analysis showed that the implanted Ru existed as Ru3+(~38 at%) and Ru4+(~62 at%). A decrease of the resistivity after Ru implantation was attributed to the substitution of W4+with Ru3+. The enhanced sensor response of the Ru-implanted (2 ×1014ions/cm2) WS2was attributed to the enhanced adsorption of oxygen onto the sulfur vacancies after Ru ion implantation. Decoration of Au nanoparticles (NPs) onto this gas sensor not only led to an enhancement of the response to CO gas but also improved the selectivity and dynamics of the gas sensor. The related sensing mechanism was explained in terms of the catalytic effect of Au and the spillover effect. The optimized gas sensor showed good response to CO in the presence of humidity (Rg/Ra= 3 to 50 ppm CO at 60% relative humidity, whereRais the resistance of the sensor in air andRgis its resistance in the presence of the target gas).