Fabrication of MKIDS for the MicroSpec Spectrometer
Fabrication of MKIDS for the MicroSpec Spectrometer
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DOI：
10.1109/tasc.2013.2240152
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发表时间：
2013-01
影响因子：
1.8
通讯作者：
A. Patel;A. Brown;W. Hsieh;T. Stevenson;S. Moseley;K. U-yen;N. Ehsan;E. Barrentine;G. Manos;Edward J. Wollack
中科院分区：
文献类型：
--
作者：
A. Patel;A. Brown;W. Hsieh;T. Stevenson;S. Moseley;K. U-yen;N. Ehsan;E. Barrentine;G. Manos;Edward J. Wollack
Microspec是一种新型的亚毫米波和毫米波（250-700 μm波长）光谱仪，它可以在单一基片上完成入射光的波长分离和检测。该仪器是专为空间探索提供高光谱分辨率在一个宽的波段，而数量级小于质量和体积比目前的国家的最先进的Microspec的关键使能组件是背景有限的微波动力学电感探测器，它在光谱仪的全带宽操作。在这里，我们提出了我们的制造策略，使这些敏感的探测器。采用了0.45 μm晶体硅介质和氮化钼动态电感材料的微带结构。我们已经优化了晶圆级光刻图案，并开发了工艺，使我们能够尽量减少表面粗糙度，可能会导致检测器噪声。此外，我们还优化了低温晶圆键合工艺;该工艺使我们能够在硅介电层的两侧构建超导体。我们提出了一个最终制造的设备和谐振器在低温下运行。
Microspec is a new class of submillimeter and millimeter (250-700 μm wavelength) spectrometer, in which the wavelength separation and detection of incident light is done on a single substrate. The instrument is designed for space exploration by offering high spectral resolving power over a broad band, while being orders of magnitude smaller in mass and volume than the present state-of-the-art. The key enabling components for Microspec are background-limited microwave kinetic inductance detectors, which operate over the full bandwidth of the spectrometer. Here we present our fabrication strategy for making these sensitive detectors. A microstrip architecture utilizing a 0.45-μm crystalline silicon dielectric with a molybdenum nitride kinetic inductor material has been adopted. We have optimized wafer-scale lithographic patterning, and have developed processes that allow us to minimize surface roughness that may contribute to detector noise. Additionally, we have optimized the low-temperature wafer bonding process; this process allows us to build superconductors on both sides of the silicon dielectric layer. We present a final fabricated device and resonator operation at cryogenic temperatures.