Tunability and Calculation of the Dielectric Constant of Capacitor Structures with Interdigital Electrodes
Tunability and Calculation of the Dielectric Constant of Capacitor Structures with Interdigital Electrodes
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DOI：
10.1023/a:1009924716633
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发表时间：
1997-09
影响因子：
1.7
通讯作者：
D. Dimos;M. Raymond;Robert W. Schwartz;H. Alshareef;C. Mueller
中科院分区：
文献类型：
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作者：
D. Dimos;M. Raymond;Robert W. Schwartz;H. Alshareef;C. Mueller
铁电材料的介电常数的电压依赖性使得它们作为微波电路中的调谐元件具有吸引力。本研究对溶胶-凝胶法制备的铁电材料进行了电容调谐和损耗测量。我们发现具有数字间电极的Pb(Zr,Ti)O3（PZT）薄膜可以以合理的低损耗制造，使其适用于室温调谐应用。此外，发现溅射SrTiO3（ST）和溶胶-凝胶衍生dbatio3 （BT）薄膜的高温沉积后退火均能显著改善其调谐和损耗因子特性。通过在1000 - 1100℃范围内退火，样品的可调性提高了7倍，而耗散系数降低到0.3 - 0.5%。此外，研究表明，这些交叉电容结构中的薄膜的介电常数可以使用Farnell等人先前描述的分析模型来计算。
The voltage dependence of the dielectric constant of ferroelectricmaterials makes them attractive for use as tuning elements in microwavecircuits. In this study, capacitance tuning and loss measurements wereperformed on ferroelectric materials prepared by the sol-gel process and RFmagnetron sputtering. We find that Pb(Zr,Ti)O3(PZT) thinfilms with interdigital electrodes can be fabricated with reasonably lowloss to make them useful for room temperature tuning applications. Inaddition, it is found that high temperature post-deposition annealing ofboth sputtered SrTiO3(ST) and sol-gel derivedBaTiO3(BT) films markedly improves their tuning and lossfactor characteristics. By annealing the samples in the range of1000–1100°C, the tunability was increased by as much as a factorof seven, while the dissipation factors were decreased to values of0.3–0.5%. In addition, it is shown that the permittivity of thefilms in these interdigitated capacitor structures can be calculated usingan analytical model previously described by Farnell et al. [1].