Control of a Two-Axis Micromanipulator-Based Scanning Probe System for 2.5-D Nanometrology
Control of a Two-Axis Micromanipulator-Based Scanning Probe System for 2.5-D Nanometrology
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DOI：
10.1109/tmech.2009.2031595
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发表时间：
2010-10-01
影响因子：
6.4
通讯作者：
Menq, Chia-Hsiang
中科院分区：
文献类型：
--
作者：
Jayanth, G. R.;Menq, Chia-Hsiang
提出了一种基于原子力显微镜(AFM)的2.5维纳米测量通用双轴探测系统。该系统的核心是基于AFM探头的两轴柔顺微操作手，其方向和位置可以在扫描平面上主动改变。提出了三种使能技术来均匀扫描该平面内的样品表面的截面。首先，开发了一个方向控制系统，控制尖端方向以跟踪曲面截面法线的变化。其次，提出了基于攻丝模式的尖端-试件相互作用方案，根据截面的局部取向控制尖端振动方向和峰值作用力。第三，开发了一种两轴扫描方案，其中扫描和交互控制轴沿切线对齐并垂直于局部截面。总而言之，这些技术使整个扫描过程符合样品在扫描平面上的几何形状，并便于对沿两个轴具有较大几何变化的样品进行计量。在这篇文章中，开发的探测系统被用来扫描微吸管的整个顶面，并且与传统的扫描相比，显示出更大的可获得性和无伪影。
This paper presents a versatile atomic-forcemicroscope (AFM)-based two-axis probing system for 2.5-D nanometrology. Central to this system is a two-axis compliant micromanipulator based on the AFM probe whose orientation and position can be actively changed in the scanning plane. Three enabling technologies are proposed to uniformly scan the section of the sample surface within this plane. First, an orientation control system is developed that controls the tip-orientation to track the changes in normal of the surface section. Second, tapping modebased tip-sample interaction scheme is developed wherein the direction of tip oscillation and the peak force are controlled, according to the local orientation of the section. Third, a two-axis scanning scheme is developed wherein the scanning and interaction control axes are aligned along the tangent and normal to the local section. Taken together, these technologies enable the entire scanning process to conform to the geometry of the sample in the scanning plane and facilitate metrology of samples with large geometric variation along the two axes. In this paper, the developed probing system is used to scan the entire top surface of a micropipette and demonstrate greater access and absence of artifacts when compared to a conventional scan.