Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics
Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics
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DOI：
10.1063/1.2358699
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发表时间：
2006-10-01
影响因子：
1.6
通讯作者：
Yamauchi, K.
中科院分区：
文献类型：
--
作者：
Matsuyama, S.;Mimura, H.;Yamauchi, K.
我们使用 Kirkpatrick-Baez 镜开发了一种高空间分辨率扫描 X 射线荧光显微镜 (SXFM)。 SPring-8的BL29XUL二维聚焦测试结果表明，在最佳聚焦条件下，聚焦光束的半峰全宽为50 x 30 nm(2) (VxH)。测量的光束轮廓与模拟结果非常吻合。此外，尽管光子通量和尺寸之间存在权衡关系，但通过改变虚拟源尺寸，光束尺寸可以在30-1400 nm的宽范围内进行控制。为了展示 SXFM 性能，观察了使用聚焦离子束系统制作的精细测试图，以确定最佳空间分辨率。测试图中 SPring-8 徽标内部的元素分布（最小线宽约为 50 - 60 nm）使用最小聚焦 X 射线束以优于 30 nm 的空间分辨率进行可视化。 (c) 2006 年美国物理研究所。
We developed a high-spatial-resolution scanning x-ray fluorescence microscope (SXFM) using Kirkpatrick-Baez mirrors. As a result of two-dimensional focusing tests at BL29XUL of SPring-8, the full width at half maximum of the focused beam was achieved to be 50 x 30 nm(2) (VxH) under the best focusing conditions. The measured beam profiles were in good agreement with simulated results. Moreover, beam size was controllable within the wide range of 30 - 1400 nm by changing the virtual source size, although photon flux and size were in a trade-off relationship. To demonstrate SXFM performance, a fine test chart fabricated using focused ion beam system was observed to determine the best spatial resolution. The element distribution inside a logo mark of SPring-8 in the test chart, which has a minimum linewidth of approximately 50 - 60 nm, was visualized with a spatial resolution better than 30 nm using the smallest focused x-ray beam. (c) 2006 American Institute of Physics.