Permanent Magnets for MEMS
Permanent Magnets for MEMS
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DOI：
10.1109/jmems.2009.2034389
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发表时间：
2009-12-01
影响因子：
2.7
通讯作者：
Wang, Naigang
中科院分区：
文献类型：
--
作者：
Arnold, David P.;Wang, Naigang
本文综述了适用于微电子机械系统(MEMS)的永磁体的微细加工技术。永磁体是实现基于磁性的MEMS传感器、执行器和能量转换器的关键构件。本文首先介绍了永磁体的基本理论和工作原理。然后，介绍了不同种类的永磁体材料和相关的性能权衡。然后讨论了与将永磁体集成到MEMS应用中有关的挑战。最后，对以前报道的制备方法和材料性能进行了总结和回顾。
This paper reviews the state of the art for the microfabrication of permanent magnets applicable to microelectromechanical systems (MEMS). Permanentmagnets are a key building block for the realization of magnetically based MEMS sensors, actuators, and energy converters. In this paper, the basic theories and operational concepts for permanent magnets are first described. Then, different classes of permanent-magnet materials and associated performance tradeoffs are introduced. Challenges relating to the integration of permanent magnets into MEMS applications are then discussed. Last, a summary and review of previously reported fabrication strategies and material properties is provided.