HIGH-SPEED MICRO POSITIONING SYSTEM BASED ON COARSE FINE PAIR CONTROL
HIGH-SPEED MICRO POSITIONING SYSTEM BASED ON COARSE FINE PAIR CONTROL
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DOI：
10.1016/0957-4158(95)00033-2
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发表时间：
1995-09-01
期刊：
影响因子：
3.3
通讯作者：
KWAK, YK
中科院分区：
文献类型：
--
作者：
PARK, KH;LEE, JH;KWAK, YK
建议采用粗/细对控制系统来缓解在大运动范围内获得高精度的困难。利用电磁原理开发了一种能够在大工作范围内提供高力的粗调执行器。使用压电材料引入了具有高精度的精细致动器。粗/精执行器对系统应用于磁光（MO）磁盘驱动器，以提高系统在速度和精度方面的性能。
A coarse/fine pair control system is suggested to relieve the difficulty of obtaining high accuracy over a large movement. A coarse actuator which is capable of high force in a large working range is developed using electromagnetic principle. A fine actuator having a high accuracy is introduced using a piezoeletric material. The coarse/fine actuator pair system is applied to magneto-optical (MO) disk drives to enhance the system's performance in terms of speed and accuracy.