Isotope Effect of H–/D– Volume Production in Low‐Pressure H2/D2 Plasmas – Measurement of VUV Emissions and Negative Ion Densities
Isotope Effect of H–/D– Volume Production in Low‐Pressure H2/D2 Plasmas – Measurement of VUV Emissions and Negative Ion Densities
复制标题
低压 H2/D2 等离子体中 H–/D– 批量生产的同位素效应 – VUV 发射和负离子密度的测量
DOI：
10.1002/ctpp.200410073
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发表时间：
2004
影响因子：
1.6
通讯作者：
Y. Takeiri
中科院分区：
文献类型：
--
作者：
O. Fukumasa;S. Mori;N. Nakada;Y. Tauchi;M. Hamabe;K. Tsumori;Y. Takeiri
通过测量真空紫外辐射和源内负离子密度，研究了同位素对H-/D-体积产生的影响。在双等离子体型源中，在某些放电条件下，提取的D-电流几乎与H-电流相同，尽管D2等离子体中的VUV发射强度（对应于振动激发分子的产生）略低于H2等离子体中的VUV发射强度。考虑到质量差引起的因子φ 2，在源的引出区中D-离子密度高于H-离子密度。在另一个实验中，一个矩形的电弧室中，H-/D-离子密度的轴向分布的源直接使用激光光剥离方法测量。讨论了H-/D-产生与磁过滤器等离子体参数控制的关系。此外，与源中的负离子密度相比，讨论了提取的负离子电流的相对强度。通过磁场的灯丝位置和磁场强度的良好组合，实现了D2等离子体的产生和控制。提取的H-和D-电流直接依赖于源中的负离子密度。（© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA，魏因海姆）
Isotope effect on H–/D– volume production is studied by measuring both VUV emission and negative ion density in the source. In a double plasma type source, under some discharge conditions, extracted D– currents are nearly the same as H– currents, although VUV emission intensity (corresponding to production of vibrationally excited molecules) in D2 plasmas is slightly lower than that in H2 plasmas. Considering the factor √2 due to mass difference, D– ion density in the extraction region of the source is higher than H– ion density. In another experiment with a rectangular arc chamber, axial distributions of H–/D– ion densities in the source are measured directly using a laser photodetachment method. Relationship between H–/D– production and plasma parameter control with using a magnetic filter (MF) is discussed. Furthermore, relative intensities of extracted negative ion currents are discussed compared with the negative ion densities in the source. Production and control of D2 plasmas are well realized with the MF including good combination between the filament position and field intensity of the MF. Extracted H– and D– currents depend directly on negative ion densities in the source. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)