Optimization of a Wolter type I mirror for a soft X-ray microscope
Optimization of a Wolter type I mirror for a soft X-ray microscope
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DOI：
10.1016/j.precisioneng.2005.09.002
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发表时间：
2006-04
影响因子：
3.6
通讯作者：
K. Chon;Y. Namba;K. Yoon
中科院分区：
文献类型：
--
作者：
K. Chon;Y. Namba;K. Yoon
由于希望在高分辨率下研究活细胞，对X射线显微镜的需求受到了广泛关注。用于软X射线显微镜光学器件的Wolter I型反射镜具有许多优点。虽然已经取得了很大的进展，但这种反射镜的制造仍然不容易，并满足表面粗糙度和形状误差的要求。从反射镜制造的角度来看，有必要了解反射镜设计和公差预算，特别是关于表面粗糙度和形状误差。本文论述了Wolter Ⅰ型显微镜反射镜的设计和优化。通过选择一个最佳的中心掠入射角进行优化，其中的评价函数具有最大值。还检查了反射镜的图像质量。由于阿贝正弦条件，较小的直径提供更好的图像质量。最后用正弦变形波模拟了轴向和径向的形状误差，得到了形状公差。
The demand for an X-ray microscope has received much attention because of the desire to study living cells under high resolution. A Wolter type I mirror used for soft X-ray microscope optics has a number of advantages. Although much progress has been made, it is still not easy to fabricate this mirror and satisfy the surface roughness and figure error requirements. From the mirror fabrication point of view, it is necessary to see the mirror design and the tolerance budget, especially with respect to the surface roughness and the figure errors. This paper deals with the design and optimization of a Wolter type I microscope mirror. The optimization was carried out by choosing an optimum central grazing incidence angle for which a merit function had the maximum value. The image quality of the mirror was also examined. A smaller diameter gave better image quality because of the Abbe sine condition. Finally, the figure errors for the axial and the radial directions were simulated by sinusoidal deformation waves, and the figure tolerance was obtained.