Development of a large-force low-loss metal-contact RF MEMS switch
Development of a large-force low-loss metal-contact RF MEMS switch
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DOI：
10.1016/j.sna.2006.02.016
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发表时间：
2006-11-20
影响因子：
4.6
通讯作者：
Sugiyama, S.
中科院分区：
文献类型：
--
作者：
Seki, T.;Uno, Y.;Sugiyama, S.
针对射频微电子机械系统(RFMEMS)开关在实际应用中面临的难题，采用非线性弹簧系统作为静电执行器，改善了RFMEMS开关恢复力大的问题。当活动电极面积为1.4 mm(2)的静电执行器在24V电压下驱动时，分析表明，恢复力是常规线性弹簧系统的3倍，并且具有稳定的信号开关控制作用。通过对塑料模具封装中射频特性的模拟和观察，证明该驱动器具有相当于或超过正本征负二极管(PIN)和金属半导体场效应晶体管(MESFET)特性的能力。(C)2006爱思唯尔B.V.保留所有权利。
We improved the large restoration force of a radio-frequency microelectromechanical system (RF MEMS) switch, which had been a challenge in the practical application of RF MEMS switches, by adopting a non-linear spring system for the electrostatic actuator. When an electrostatic actuator with a movable electrode area of 1.4 mm(2) was driven at a voltage of 24 V, analysis showed a restoration force three-fold greater than that of conventional linear spring systems and a stable signal on-off control action. It was also established from simulation and observation of the RF characteristics in a plastic mold package that the actuator has the ability comparable to or exceeding the characteristics of positive intrinsic negative (PIN) diodes and GaAs metal-semiconductor field-effect transistors (MESFETs). (c) 2006 Elsevier B.V. All rights reserved.