Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit
Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit
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DOI：
10.1063/1.2171650
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发表时间：
2006-01-30
影响因子：
4
通讯作者：
Esashi, M
中科院分区：
文献类型：
--
作者：
Kim, SJ;Ono, T;Esashi, M
在这封信中，电容式质量传感与250 nm厚的单晶硅悬臂梁进行了研究。质量传感器采用使用电LC振荡器的频率调制检测方法，其中传感器的电容用作振荡器的分量。所演示的电容检测的位移噪声为0.05 nm/（Hz）（0.5），相当于2.4x10（-21）F的电容变化。实验结果表明，电容检测比光学检测受温度波动噪声的影响小。可检测的最小质量为1x 10（-14）g，在环境大气中使用电容检测实现。(c)2006年，美国物理学会。
In this letter, capacitive mass sensing with a 250-nm-thick single-crystalline silicon cantilever is investigated. The mass sensor employs the frequency modulation detection method using an electrical LC oscillator, in which the capacitance of the sensor serves as the component of the oscillator. The displacement noise of the demonstrated capacitive detection is 0.05 nm/(Hz)(0.5), which is equivalent to the capacitance change of 2.4x10(-21) F. It is experimentally shown that the capacitive detection is less affected to temperature fluctuation noise than optical detection. The detectable minimum mass of 1x10(-14) g is achieved using capacitive detection in ambient atmosphere. (c) 2006 American Institute of Physics.