Stainless microfluidic probe with 2D-array microapertures
Stainless microfluidic probe with 2D-array microapertures
复制标题
DOI：
10.1063/5.0014119
复制
发表时间：
2021-01-01
期刊：
影响因子：
1.6
通讯作者：
Terao, Kyohei
中科院分区：
文献类型：
--
作者：
Takahashi, Koki;Kamiya, Shogo;Terao, Kyohei
微流体探针（MFP）不需要流动通道的物理壁，从而能够通过注射和抽吸溶液来在开放空间中应用化学溶液。然而，在传统的MFP制造方法中，使用窄间隔的2D孔径阵列来增强治疗功能仍然受到限制。在这项研究中，我们开发了一种不锈钢MFP（stMFP），以产生窄间距的二维孔径阵列。stMFP开发使用堆叠技术，其中通过光刻和湿法蚀刻工艺制造的不锈钢基板堆叠并通过热扩散结合。这个过程中产生的6行和8列的孔径阵列的孔径尺寸为100 × 150 μ m和50 μ m的窄间隔。通过荧光抗体的生物图案化来评估表面处理区域。结果表明，stMFP生物图案化的最小处理面积为3.3 × 10（3）μ m（2），其可以通过改变孔径布置控制在5.1 × 10（4）μ m（2）和3.0 × 10（5）μ m（2）之间。此外，当两种类型的荧光抗体沿行方向交替注入时，在3.8 × 10（5）μ m（2）的宽区域上形成6个6.1 × 10（4）μ m（2）的独立处理区域。此外，使用4 × 4孔径阵列的生物图案化显示，可以产生具有4行和2列的2D治疗区域，其面积为4.5 × 10（5）μ m（2）。单个stMFP可以形成各种2D处理图案，有望实现生物领域的高性能生物处理。
A microfluidic probe (MFP) does not require physical walls for flow channels, enabling application of a chemical solution in an open space by injecting and aspirating the solution. However, in conventional MFP fabrication methods, the use of a 2D aperture array at narrow intervals to enhance the function of treatment remains limited. In this study, we developed a stainless MFP (stMFP) to produce a 2D aperture array at narrow intervals. The stMFP was developed using a stacking technique in which stainless steel substrates fabricated by photolithography and a wet etching process were stacked and bonded through thermal diffusion. This process resulted in a 6-row and 8-column aperture array with an aperture size of 100 x 150 mu m and a narrow interval of 50 mu m. The surface treatment area was evaluated by biopatterning of a fluorescent antibody. The results showed that the stMFP biopatterned a minimum treatment area of 3.3 x 10(3)mu m(2), which could be controlled between 5.1 x 10(4)mu m(2) and 3.0 x 10(5)mu m(2) by changing the aperture arrangement. In addition, when two types of fluorescent antibodies were alternately injected in the row direction, six independent treatment areas of 6.1 x 10(4)mu m(2) were formed over a wide area of 3.8 x 10(5)mu m(2). Furthermore, biopatterning using a 4 x 4 aperture array showed that a 2D treatment area with 4-rows and 2-columns can be produced with an area of 4.5 x 10(5)mu m(2). A single stMFP can form various 2D treatment patterns, which is expected to realize high-performance bioprocessing in the field of biology.