Small scanning mirror mechanism
Small scanning mirror mechanism
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DOI：
10.1109/aim.2003.1225501
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发表时间：
2003-07
期刊：
影响因子：
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通讯作者：
E. Onillon;S. Henein;P. Theurillat
中科院分区：
文献类型：
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作者：
E. Onillon;S. Henein;P. Theurillat
CSEM开发了一种光学机械线性扫描仪。该扫描仪具有有限的位移范围，以高分辨率执行。分辨率是通过扫描仪本身的非常高精度的运动引导来获得的。本文介绍了扫描仪系统的主要特点及其控制系统。在对系统进行完整描述之后，引入了从系统的机械和电气方程导出的状态空间模型。该模型将用于基于极点配置算法的状态空间控制器的设计，使系统表现为四阶贝塞尔滤波器。为了更好地跟踪期望的参考轨迹，前馈将被添加到控制器以及干扰观测器。此外，在每次启动时，执行自动识别，然后执行控制器重新计算。
The CSEM has developed an optomechanical linear scanner. This scanner has a limited displacement range, performed with high resolution. The resolution is obtained through a very high precision motion guiding of the scanner itself. This paper describes the main features of the scanner system as well as its control system. After a complete description of the system, a state space model derived from the mechanical and electrical equations of the system is introduced. This model will be used for the design of a state space controller based on a pole placement algorithm, to make the system behave as a fourth order Bessel filter. To better track the desired reference trajectory, a feedforward will be added to the controller as well as a disturbance observer. Moreover, at each startup, an auto identification followed by a controller re-calculation is performed.