Long-Retention Ferroelectric-Gate FET with a (HfO_2)_x(Al_2O_3)_<1-x> Buffer-Insulating Layer for 1T FeRAM

Long-Retention Ferroelectric-Gate FET with a (HfO_2)_x(Al_2O_3)_<1-x> Buffer-Insulating Layer for 1T FeRAM
复制标题

用于 1T FeRAM 的具有 (HfO_2)_x(Al_2O_3)_<1-x> 缓冲绝缘层的长保持铁电栅极 FET

DOI:
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发表时间:
2004
期刊:
IEEE International Electron Devices Meeting Technical Digest 50^<th>,2004
影响因子:
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通讯作者:
Rajangam Ilangovan
Rajangam Ilangovan
中科院分区:
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文献类型:
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作者:
Shigeki Sakai;Mitsue_Takahashi;Rajangam Ilangovan

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