Characteristics of PHEMTs and MSM photodetectors simultaneously fabricated on the same epitaxial wafer with In0.75Ga0.25As/InGaAs channel layer
Characteristics of PHEMTs and MSM photodetectors simultaneously fabricated on the same epitaxial wafer with In0.75Ga0.25As/InGaAs channel layer
复制标题
在同一外延片上同时制作具有 In0.75Ga0.25As/InGaAs 沟道层的 PHEMT 和 MSM 光电探测器的特性
DOI:
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发表时间:
2011
期刊:
影响因子:
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通讯作者:
Tsutomu Iida and Yoshifumi Takanashi
中科院分区:
文献类型:
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作者:
Hirohisa Taguchi;Yuta koreeda;Yutaka Endo;kouichi Sato;Kenya Yoshizawa;Yui Nishio;Tsutomu Iida and Yoshifumi Takanashi