Thin palladium membrane microreactors with oxidized porous silicon support and their application
Thin palladium membrane microreactors with oxidized porous silicon support and their application
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氧化多孔硅载体钯薄膜微反应器及其应用
DOI：
10.1088/0960-1317/15/11/004
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发表时间：
2005
影响因子：
2.3
通讯作者：
F. Mizukami
中科院分区：
文献类型：
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作者：
Shupeng Ye;Shuji Tanaka;M. Esashi;S. Hamakawa;T. Hanaoka;F. Mizukami
以氧化多孔硅（PS）为支撑体，微加工了一种基于MEMS（微机电系统）的薄钯（Pd）膜微反应器。通过在200 °C至250 °C的温度下用氢气、氮气和氦气进行渗透实验来表征膜。在250 °C和212 kPa的分压差下，通过厚度为340 nm的Pd膜的氢通量为0.112 mol m-2 s-1。H2/N2和H2/He选择性在250 °C下分别为约44和10。利用氧化的PS环实现了Pd膜的热隔离，该膜由集成微加热器加热。我们还使用开发的微型反应器在250 °C下进行了1-丁烯的氢化。在低的1-丁烯流量下，1-丁烯的转化率可达100%。结果表明，微反应器在氢气提纯和加氢反应中具有潜在的应用价值。
We microfabricated a MEMS (micro electro mechanical system)-based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen and helium at temperatures ranging from 200 °C to 250 °C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m−2 s−1 at 250 °C and a partial pressure difference of 212 kPa. H2/N2 and H2/He selectivity was about 44 and 10 at 250 °C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS ring. We also carried out the hydrogenation of 1-butene at 250 °C using the developed microreactor. The conversion of 1-butene of 100% was obtained at low flow rate of 1-butene. The results show that microreactors have a potential to be used in hydrogen purification and hydrogenation.
MOROOKA，Shigeharu：工业工程化学研究。
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