T.NISHIMOTO, S.SHOJI, M.ESASHI: "Buried Piezoresistive Sensors by Means of MeV Ion Implantation" to be presented in Transducers′93 (June-Nokohama) 1993.
T.NISHIMOTO, S.SHOJI, M.ESASHI: "Buried Piezoresistive Sensors by Means of MeV Ion Implantation" to be presented in Transducers′93 (June-Nokohama) 1993.
复制标题
T.NISHIMOTO、S.SHOJI、M.ESASHI:“通过 MeV 离子注入实现埋入式压阻传感器”,将于 1993 年 Transducers´93(六月-Nokohama)中发表。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: