Massively Parallel Patterning of Complex 2D and 3D Functional Polymer Brushes by Polymer Pen Lithography

Massively Parallel Patterning of Complex 2D and 3D Functional Polymer Brushes by Polymer Pen Lithography
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通过聚合物笔光刻对复杂的 2D 和 3D 功能性聚合物刷进行大规模并行图案化

DOI:
10.1021/am405555e
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发表时间:
2014-08-13
影响因子:
9.5
通讯作者:
Zheng, Zijian
Zheng, Zijian
中科院分区:
材料科学2区
文献类型:
--
作者:
Xie, Zhuang;Chen, Chaojian;Zheng, Zijian

文献摘要

被引文献

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我们报告了高通量聚合物笔迹光刻的复合2D和3D功能聚合物刷的第一个厘米区域串行模式。聚(PGMA)(PGMA)刷子的任意2D和3D结构在较大至2 cm x 1 cm的区域中制造,其吞吐量显着的3阶大小比最先进的尺寸高。图案化的PGMA刷被进一步用作制造Au微/纳米结构和硬模具的抗拒,以供随后的软邮票模制。另一方面,这些2D和3D PGMA刷子也被用作固定生物活性分子形成2D和3D图案DNA DNA寡核苷酸和蛋白质芯片的强大和多功能平台。因此,这种低成本但高通量的“台式”串行制造方法可以很容易地应用于各种领域,包括微/纳米制作,光学和电子,智能表面和生物相关研究。
We report the first demonstration of centimeter-area serial patterning of complex 2D and 3D functional polymer brushes by high-throughput polymer pen lithography. Arbitrary 2D and 3D structures of poly(glycidyl methacrylate) (PGMA) brushes are fabricated over areas as large as 2 cm x 1 cm, with a remarkable throughput being 3 orders of magnitudes higher than the state-of-the-arts. Patterned PGMA brushes are further employed as resist for fabricating Au micro/nanostructures and hard molds for the subsequent replica molding of soft stamps. On the other hand, these 2D and 3D PGMA brushes are also utilized as robust and versatile platforms for the immobilization of bioactive molecules to form 2D and 3D patterned DNA oligonucleotide and protein chips. Therefore, this low-cost, yet high-throughput "bench-top" serial fabrication method can be readily applied to a wide range of fields including micro/nanofabrication, optics and electronics, smart surfaces, and biorelated studies.