Sputtered permanent Nd-Fe-B magnets
Sputtered permanent Nd-Fe-B magnets
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溅射永磁 Nd-Fe-B 磁体
DOI：
10.1016/0304-8853(93)90045-4
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发表时间：
1993
影响因子：
2.7
通讯作者：
V.Yu. Tsvetkov
中科院分区：
文献类型：
--
作者：
B. A. Kapitanov;N. Kornilov;Ya.L. Linetsky;V.Yu. Tsvetkov
在微电子领域中广泛使用的溅射方法也可用于获得磁性系统和微型磁体。Hill和Birtwistle [1]描述了具有PtCo薄膜溅射磁体的磁阻传感器。在参考文献中。[2，3]给出了SmCo，Sm，（Co，Fe，Cu），合金溅射磁体的超高频仪器的磁系，并在参考文献[1]中给出了SmCo，Sm，（Co，Fe，Cu），合金溅射磁体的磁系。1451表明，在SmCo和SmCo合金中，可以在溅射平面中产生良好的晶体织构和相应的单轴磁各向异性。根据公开的数据[6]，通过选择性热溅射方法获得的Nd-Fe-B合金膜中的各向异性类型取决于溅射速率。当溅射速率小于0.65 μ m/h时，在薄膜平面内形成由轴向晶体织构引起的垂直各向异性，而当溅射速率大于0.65 μ m/h时，在薄膜平面内出现易轴磁化的磁各向异性。作者Ref。[7]然而，得出的结论是，Nd-Fe-B薄膜中的垂直各向异性不仅可以通过在加热衬底上的低溅射速率获得，而且可以通过高溅射速率（大于10 pm/h）获得。高
The sputtering methods widely used in microelectronics can also be applied to obtain magnetic systems and miniature magnets. Hill and Birtwistle [l] described magnetoresistive sensors with PtCo thin-film sputtered magnets. In refs.[2, 3] the magnetic systems of SHF instruments with sputtered magnets from SmCo, and Sm,(Co, Fe, Cu),, alloys were given; and in refs. 1451 it was shown that in SmCo, and Sm&, alloys it is possible to create a good crystalline texture and a corresponding uniaxial magnetic anisotropy in the plane of sputtering. According to published data [6], the type of anisotropy in Nd-Fe-B alloy films obtained by the selective thermalized sputtering method depends on the sputtering rate. With a sputtering rate of less than 0.65 pm/h perpendicular anisotropy caused by the axial crystal texture is formed, while with a sputtering rate of more than 0.65 urn/h magnetic anisotropy with easy-axis magnetization appears in the film plane. The authors of ref.[7], however, concluded that perpendicular anisotropy in Nd-Fe-B films can be obtained not only with low sputtering rates over a heated substrate, but also with high sputtering rates (more than 10 pm/h). The high