Reduction of pitch of nanohole array by self-organizing anodic oxidation after nanoimprinting

Reduction of pitch of nanohole array by self-organizing anodic oxidation after nanoimprinting
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DOI:
10.1016/j.mee.2009.11.112
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发表时间:
2010-05
影响因子:
2.3
通讯作者:
S. Shingubara;S. Maruo;T. Yamashita;M. Nakao;T. Shimizu
S. Shingubara;S. Maruo;T. Yamashita;M. Nakao;T. Shimizu
中科院分区:
工程技术3区
文献类型:
--
作者:
S. Shingubara;S. Maruo;T. Yamashita;M. Nakao;T. Shimizu

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