3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry.
3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry.
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DOI：
10.1364/oe.16.015090
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发表时间：
2008-09
期刊：
影响因子：
3.8
通讯作者：
Yan Tang;X. Su;Yuankun Liu;Hailong Jing
中科院分区：
文献类型：
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作者：
Yan Tang;X. Su;Yuankun Liu;Hailong Jing
提出了一种先进的相位测量偏转仪（PMD）来测量非球面反射镜的三维形状。在测量过程中，分别沿被测镜光轴移动显示正弦条纹图案的液晶显示屏和观察经被测镜反射的条纹图案的相机。在每个移动位置，摄像机记录位于两个不同位置的屏幕的条纹图案。利用这些条纹图案，每个相机像素都可以在被测镜上找到一个对应的点，并得到它的坐标和斜率。通过积分，可以重建被测镜的三维形状。与传统的PMD方法相比，该方法没有明显的缺陷。它需要复杂的标定，能够准确地测量大范围表面几何形状的非球面反射镜的绝对高度。此外，该方法还具有较强的抗噪声能力。计算机仿真和初步实验验证了该方法的可行性。
An advanced Phase Measuring Deflectometry(PMD) is proposed to measure the three dimensional (3D) shape of the aspheric mirror. In the measurement process, a liquid crystal display(LCD)screen displaying sinusoidal fringe patterns and a camera observing the fringe patterns reflected via the tested mirror, are moved along the tested mirror optical axis, respectively. At each movement position, the camera records the fringe patterns of the screen located at two different positions. Using these fringe patterns, every camera pixels can find a corresponding point on the tested mirror and gets its coordinate and slope. By integrating, the 3D shape of the tested mirror can be reconstructed. Compared with the traditional PMD, this method doesn???t need complex calibration and can measure the absolute height of the aspheric mirror which has large range of surface geometries unambiguously. Furthermore, this method also has strong anti-noise ability. Computer simulations and preliminary experiment validate the feasibility of this method.