Direct Frictional Driven Surface Acoustic Wave Motor
Direct Frictional Driven Surface Acoustic Wave Motor
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直接摩擦驱动表面声波电机
DOI：
10.1109/sensor.1995.717219
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
T. Higuchi
中科院分区：
文献类型：
--
作者：
M. Takahashi;M. Kurosawa;T. Higuchi
首次成功地操作的超声波直线电机使用的瑞利波进行了描述。衬底材料是127.8/spl deg/Y切割LiNbO/sub 3/直径为3英寸的晶片。布置四个IDT以在两个方向上激发x传播波和y传播波。叉指换能器的尺寸为25 mm孔径尺寸、400 /spl mu/m间距、100 /spl mu/m条带宽度和10对。操作面积约为25平方毫米。驱动频率在X方向上为约9.6MHz，在y方向上为约9.1MHz。成功的最重要的一点是接触表面的形状和滑块材料。对于接触材料，引入直径约1 mm的小球以获得足够高的约100 MPa的接触压力。试验了红宝石球、钢球和碳化钨球。每个滑块有三个球，以获得稳定的接触在三个点。最大传输速度约为20 cm/sec。通过改变驱动电压可以控制传输速度。
First success in operation of an ultrasonic linear motor using the Rayleigh wave is described. A substrate material is 127.8/spl deg/ Y-cut LiNbO/sub 3/ wafer whose diameter is 3 inches. Four IDT are arranged to excite x-propagation wave and y- propagation wave in both directions. The dimensions of the IDT are 25 mm aperture size, 400 /spl mu/m pitch, 100 /spl mu/m strip width and 10 pairs. The operation area is about 25 mm square. The driving frequency is about 9.6 MHz in x- direction and about 9.1 MHz in y-direction. The most important point of the success is the shape of a contact surface and slider materials. For the contact materials, small balls about 1 mm in diameter are introduced to obtain high contact pressure enough around 100 MPa. Ruby balls, steel balls and tungsten carbide balls are tried. Each slider has three balls to get stable contact at three points. The maximum transfer speed is about 20 cm/sec. The transfer speed is controllable by changing the driving voltage.