Fabrication of high-temperature superconducting Josephson junctions on substrates patterned by focused ion beam
Fabrication of high-temperature superconducting Josephson junctions on substrates patterned by focused ion beam
复制标题
在聚焦离子束图案化的基板上制造高温超导约瑟夫森结
DOI：
10.1063/1.122259
复制
发表时间：
1998
影响因子：
4
通讯作者：
J. Melngailis
中科院分区：
文献类型：
--
作者：
C. Chen;I. Jin;S. Pai;Z. Dong;C. Lobb;T. Venkatesan;K. Edinger;J. Orloff;J. Melngailis
在（100）LaAlO 3衬底上通过聚焦离子束铣削在膜沉积之前图案化高纵横比沟槽。随后的YBCO薄膜沉积脉冲激光沉积被发现自然打破跨越这些沟槽。然后原位沉积Au以连接分离的YBCO电极。然后在沟槽上图案化结以形成超导体/正常/超导体配置。反向分流的结表现出高达86 K的超电流。在微波辐照下，结的I-V特性呈现出明显的Shapiro台阶。横向磁场的衍射图案指示均匀的电流分布在整个结。
High aspect ratio trenches were patterned on (100) LaAlO3 substrates by focused ion-beam milling prior to film deposition. Subsequent YBCO films deposited by pulsed laser deposition were found to break naturally across these trenches. In situ Au was then deposited to connect the separated YBCO electrodes. Junctions were then patterned across the trenches to form a superconductor/normal/superconductor configuration. The resistively shunted junctions exhibited supercurrents up to 86 K. Under microwave irradiation, the junctions exhibited a number of clear Shapiro steps in the I–V characteristics. The transverse magnetic-field diffraction pattern indicted uniform current distribution across the junction.