Waveguide integration of a >4.7-THz quantum-cascade laser
Waveguide integration of a >4.7-THz quantum-cascade laser
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>4.7-THz 量子级联激光器的波导集成
DOI：
10.1049/ell2.12703
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发表时间：
2023
影响因子：
1.1
通讯作者：
Nuttall E
中科院分区：
文献类型：
--
作者：
Nuttall E
波导集成的太赫兹量子级联激光器（THz QCL）的频率超过4.7太赫兹。精密微机械加工技术，然后金刚石车削和化学镀已被用来制造空心矩形波导集成对角喇叭。结果表明，表面粗糙度在101 μm$\approx {1}\，{\mu }\text{m}$的水平上实现，使在4.75-5.05 THz波段的辐射的外耦合，与发散角<5沿着QCL衬底的平面。
Waveguide integration of terahertz quantum cascade lasers (THz QCLs) is demonstrated at frequencies above 4.7 THz. A precision micromachining technique, followed by diamond‐turning and electroless‐plating has been used to manufacture hollow rectangular waveguides with integrated diagonal feedhorns. It is shown that surface roughness at the ≈1μm$\approx {1}\,{\mu }\text{m}$ level is achieved, enabling outcoupling of radiation in the 4.75–5.05 THz band, with a divergence angle of <5∘${<5^{\circ }}$ along the plane of the QCLs substrate.