Role of peripheral vacuum regions in the control of the electron cyclotron resonance plasma uniformity
Role of peripheral vacuum regions in the control of the electron cyclotron resonance plasma uniformity
复制标题
外围真空区域在电子回旋共振等离子体均匀性控制中的作用
DOI：
10.1063/1.123717
复制
发表时间：
1999
影响因子：
4
通讯作者：
Y. Kawai
中科院分区：
文献类型：
--
作者：
Y. Ueda;H. Muta;Y. Kawai
离子饱和电流密度的空间测量表明，在电子回旋共振（ECR）等离子体外围有稳定的真空区。真空区域有可能通过充当入射电磁波的波导来促进等离子体的均匀性。实验观察了长波长电磁波在一定径向位置向右圆偏振波的模式转换。在此基础上，对微波在部分填充等离子体腔中的传播进行了数值模拟。仿真结果表明，在等离子体外围传播的长波电磁波在ECR区域外被转化为超常波或静电波，并且在局部区域发生了功率吸收。对这些结果的物理考虑暗示了磁场梯度影响等离子体均匀性的原因。
Spatial measurements of the ion saturation current density indicate stable vacuum regions in a periphery of electron cyclotron resonance (ECR) plasma. The vacuum regions have a possibility to contribute to plasma uniformity by behaving as a waveguide for the incident electromagnetic waves. Mode conversion of electromagnetic waves with long wavelength to the right circular polarized wave was observed experimentally at a certain radial position. Furthermore, microwave propagation in a partially filled plasma chamber was examined numerically. The simulation indicated that the electromagnetic waves with long wavelengths propagated in a periphery of the plasma were converted into the extraordinary wave or electrostatic waves outside the ECR region and that the power absorption took place at the local regions. Physical considerations toward these results imply the reason why the plasma uniformity is influenced by magnetic field gradient.