F.Koyama: "RIBE micro-fabrication of semiconductor photonic devices for micro-photonic integrated circuits" Proceedings of IEEEE LEOS Annual Meeting. I05.2. 287-288 (1994)
F.Koyama: "RIBE micro-fabrication of semiconductor photonic devices for micro-photonic integrated circuits" Proceedings of IEEEE LEOS Annual Meeting. I05.2. 287-288 (1994)
复制标题
F.Koyama:“用于微光子集成电路的半导体光子器件的RIBE微制造”IEEEE LEOS年会论文集。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: