Effect of plasma-on time on the axial uniformity of DLC film coated in narrow metal tube with microwave-excited high-density near plasma
Effect of plasma-on time on the axial uniformity of DLC film coated in narrow metal tube with microwave-excited high-density near plasma
复制标题
等离子体开启时间对微波激发高密度近等离子体窄金属管涂覆DLC薄膜轴向均匀性的影响
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通讯作者：
Noritsugu Umehara
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作者：
Ryosuke Matsui;Hiroyuki Kousaka;Noritsugu Umehara
