Properties of DLC Film Deposited on Mould with Micro-Cavity Used in Microforming
Properties of DLC Film Deposited on Mould with Micro-Cavity Used in Microforming
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DOI：
10.1080/10584587.2012.686729
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发表时间：
2012-01
影响因子：
0.7
通讯作者：
Chunju Wang;B. Guo;D. Shan;Hua Zhang
中科院分区：
文献类型：
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作者：
Chunju Wang;B. Guo;D. Shan;Hua Zhang
微成形作为一种金属成形工艺，非常适合于大批量生产具有高力学性能的微小型零件。为了消除微成形过程中摩擦的尺度效应，利用等离子体基离子注入沉积（PBII&D）技术在微模具上沉积了具有良好摩擦学性能的纳米级类金刚石薄膜。研究了模具型腔尺寸对DLC膜厚度分布、表面形貌和微观结构的影响。结果表明，随着进入型腔深度的增加，DLC膜的厚度从554 nm减小到47 nm。当腔体尺寸较小时，会出现涟漪形貌。随着腔体尺寸的增大，ID/IG比值增大，SP3键的数量减少。利用DLC膜沉积凹模，采用落料-拉深工艺，成功地用0.04mm厚的紫铜薄板成形出直径为1.1mm的微型杯形件。并对微杯的表面质量和尺寸精度进行了详细的分析。结果表明，类金刚石薄膜是微成形的一种可行的替代材料。
Micro-forming as a kind of metal forming process is very suitable for massive production of micro-parts with high mechanical properties. To eliminate the scaling effects of friction in micro-forming, diamond-like carbon (DLC) film of nano-thickness was deposited on the micro mould with plasma based ion implantation and deposition (PBII&D) method for its excellent tribological behaviors. The effects of mould cavity dimensions were investigated, for example distribution of thickness, surface topography and microstructure of DLC film. The result shows that the thickness of DLC film decreases from 554 nm to 47 nm with the increasing of depth into mould cavity. And ripple topography appears when the cavity dimension is small. The ratio between ID and IG increases with the increasing of cavity dimension, which means that the amount of SP3 bonds becomes smaller. With the DLC film deposited female die, micro-cups of 1.1 mm in diameter were manufactured successfully using copper thin sheet of 0.04 mm in thickness with a blanking-deep drawing process. And the surface quality and dimension accuracy of micro-cup were analyzed in details. The results show that DLC film is feasible alternative to micro-forming.