A Multistate Single-Connection Calibration for Microwave Microfluidics
A Multistate Single-Connection Calibration for Microwave Microfluidics
复制标题
微波微流控的多态单连接校准
DOI：
10.1109/tmtt.2017.2758364
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发表时间：
2018
影响因子：
4.3
通讯作者：
J. Hwang
中科院分区：
文献类型：
--
作者：
Xiao Ma;N. Orloff;Charles A. E. Little;Christian J. Long;I. E. Hanemann;Song Liu;J. Mateu;J. Booth;J. Hwang
随着微波微流体设备在医学、化学和生物学方面的应用不断涌现，许多研究人员希望能够在一个连接中实现快速准确的校准。然而，传统的晶片上或同轴校准需要在测量微波微流体装置之前测量数据的几个不同的伪影。理想情况下，单个伪影将能够呈现不同的阻抗状态，以校正矢量网络分析仪数据，最大限度地减少漂移并消除伪影之间的连接错误。在这里，我们开发了一种多态单连接校准，使用加载有微流体通道的共面波导。然后，我们使用测量的未校正的散射参数的共面波导与空的通道，充满去离子水，并填充有30重量%（30克每升）的盐水，以构建一个八项误差模型和开关项校正。校正后，测量的散射参数与基于文献的有限元模拟之间的残差在100 MHz至110 GHz范围内低于−40 dB。这种多态单连接校准与晶圆探测和连接器化的微波微流体设备兼容，用于精确的阻抗谱和材料表征，而不需要多个设备测量。
With emerging medical, chemical, and biological applications of microwave-microfluidic devices, many researchers desire a fast and accurate calibration that can be achieved in a single connection. However, traditional on-wafer or coaxial calibrations require measurements of several different artifacts to the data prior to measuring the microwave-microfluidic device. Ideally, a single artifact would be able to present different impedance states to correct the vector network analyzer data, minimizing drift and eliminating artifact-to-artifact connection errors. Here, we developed a multistate single-connection calibration that used a coplanar waveguide loaded with a microfluidic channel. We then used measurements of the uncorrected scattering parameters of the coplanar waveguide with the channel empty, filled with deionized water, and filled with 30 w% (30 grams per liter) of saline to construct an eight-term error model and switch-term correction. After correction, the residuals between measured scattering parameters and with the literature-based finite-element simulations were below −40 dB from 100 MHz to 110 GHz. This multistate single-connection calibration is compatible with both wafer-probed and connectorized microwave-microfluidic devices for accurate impedance spectroscopy and materials characterization without the need for multiple device measurements.