Pulsed metal ion source by triggerless shunting arc discharge
Pulsed metal ion source by triggerless shunting arc discharge
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采用无触发分流电弧放电的脉冲金属离子源
DOI：
10.1116/1.590654
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发表时间：
1999
影响因子：
1.4
通讯作者：
S. Masamune
中科院分区：
文献类型：
--
作者：
K. Yukimura;R. Isono;T. Monguchi;K. Yoshioka;S. Masamune
分流电弧是一种在低压气体中不需要任何触发源而自点火的电弧放电。将讨论分流电弧在等离子体基离子注入的脉冲离子源中的可能应用。在2.7 - 1300 Pa的氩气环境中，通过20 μF电容器（1.5-3.0 kV）的脉冲电流加热直径为0.05 mm的35 mm长钛（Ti）丝。电弧点火由伴随着电弧电流的突然增加的线电压的突然降低指示。紫外光谱表明，等离子体含有钛离子和中性的电弧放电装置产生。最大电弧电流为约2.1 kA，电弧电压为200-300 V。丝温度估计为约1500 K，远低于Ti的熔点。因此，焊丝在电弧放电期间保持固相，使得焊丝可以重复使用。离子从等离子体中提取的5 kV，10 μs的负高压脉冲施加到…
The shunting arc is an arc discharge that is self-ignited in a low pressure gas without any trigger source. Possible application of the shunting arc to a pulsed ion source for plasma based ion implantation will be discussed. A 35 mm long titanium (Ti) wire 0.05 mm in diameter is heated by means of pulsed current from a 20 μF capacitor (1.5–3.0 kV) in an argon environment with pressure from 2.7 to 1300 Pa. Arc ignition was indicated by an abrupt decrease of the wire voltage accompanied by an abrupt increase of the arc current. Ultraviolet light spectroscopy has shown that a plasma containing Ti ions and neutrals is produced by means of the arc discharge. The maximum arc current is about 2.1 kA with arc voltage of 200–300 V. The wire temperature is estimated at about 1500 K, well below the melting point of Ti. The wire therefore remains in a solid phase during the arc discharge so that the wire can be used repeatedly. Ions are extracted from the plasma by a 5 kV, 10 μs negative high voltage pulse applied to...