Using Solvent Immersion to Fabricate Variably Patterned Poly(methyl methacrylate) Brushes on Silicon Surfaces
Using Solvent Immersion to Fabricate Variably Patterned Poly(methyl methacrylate) Brushes on Silicon Surfaces
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DOI：
10.1021/ma801127m
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发表时间：
2008-11-25
期刊：
影响因子：
5.5
通讯作者：
Chang, Feng-Chih
中科院分区：
文献类型：
--
作者：
Chen, Jem-Kun;Hsieh, Chih-Yi;Chang, Feng-Chih
在本文中，我们描述了一种用于生成各种聚合物刷图案的接枝聚合/溶剂浸泡方法。我们使用超大规模集成 (VLSI) 工艺在图案化的 Si(100) 表面上生成清晰的聚合甲基丙烯酸甲酯 (MMA) 图案。首先通过在热蒸发器中使羟基化的Si表面与六甲基二硅氮烷反应来生成Si(CH3)(3)基团的单层以形成惰性表面。使用电子束光刻在 1:1 的占空比下使用氧等离子体重新激活图案化表面。表面产生的氧物质，如 Si-O 和 Si-O-O，与图案化羟基化表面上的原子转移自由基聚合 (ATRP) 引发剂反应。然后使用图案化表面上的ATRP引发剂对MMA进行接枝聚合以制备PMMA刷。将呈现这些 PMMA 刷的线和点的晶片浸入水和四氢呋喃中后，我们分别观察到具有各种图案分辨率的 PMMA 刷的蘑菇状和刷状状态。
In this paper we describe a graft polymerization/solvent immersion method for generating various patterns of polymer brushes. We used a very-large-scale integration (VLSI) process to generate well-defined patterns of polymerized methyl methacrylate (MMA) on patterned Si(100) surfaces. A monolayer of Si(CH3)(3) groups was first generated to form an inert surface by reacting a hydroxylated Si surface with hexamethyldisilazane in a thermal evaporator. Oxygen plasma was the used to reactivate the patterned surface under a duty ratio of 1: 1 using electron beam lithography. The surface-generated oxygen species, such as Si-O and Si-O-O, reacted with the initiator for atom transfer radical polymerization (ATRP) on the patterned hydroxylated surface. The ATRP initiator on the patterned surface was then used for the graft polymerization of MMA to prepare the PMMA brushes. After immersion of wafers presenting lines and dots of these PMMA brushes in water and tetrahydrofuran, we observed mushroom- and brush-like regimes, respectively, for the PMMA brushes with various pattern resolutions.