Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer
Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer
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DOI：
10.1016/j.sna.2010.04.006
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发表时间：
2011-01-01
影响因子：
4.6
通讯作者：
Shoji, Shuichi
中科院分区：
文献类型：
--
作者：
Shinohara, Hidetoshi;Mizuno, Jun;Shoji, Shuichi
通过真空紫外光(VUV)照射、氧气存在下的真空紫外光照射(VUV/O-3)或氧等离子体处理来实现两个环烯烃聚合物(COP)板的低温直接键合。在拉伸试验后，粘结强度足够强，可以在断裂表面观察到整体破坏。用衰减全反射傅里叶变换红外光谱仪(ATR-FT-IR)、X射线光电子能谱(XPS)、接触角测量和原子力显微镜(AFM)表面分析方法对处理后的CoP样品进行了分析，探讨了低温直接键合的机理。这些实验结果表明，每个处理都产生了极性官能团(如-OH、-COOH)。这些基团有望在室温下在经过处理的COPS表面产生包括氢键在内的偶极相互作用。在VUV和VUV/O-3处理的情况下，COP也发生了降解，降解层起到了直接粘接的作用。热退火可促进氢键转变为强共价键(-C-O-C-)的形成。(C)2010爱思唯尔B.V.保留所有权利。
Low-temperature direct bonding of two cyclo-olefin polymer (COP) plates is realized by pretreatments of vacuum ultraviolet (VUV) light irradiation, VUV irradiation in the presence of oxygen gas (VUV/O-3), or oxygen plasma treatment. The bond strength was strong enough to observe bulk destruction on the fractured surfaces after the tensile test of the sample. To investigate the mechanism underlying the low-temperature direct bonding, attenuated total reflection Fourier-transform infrared spectrometer (ATR-FT-IR), X-ray photoelectron spectroscopy (XPS), contact angle measurements, and atomic force microscopy (AFM) surface analysis methods were carried out for the treated COP samples. These experimental results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate dipolar interactions including hydrogen bonds on the surfaces of the pretreated COPs at room temperature. In case of VUV and VUV/O-3 treatments, degradation of COP was also occurred and the degradation layer acted as an adhesive for the direct bonding. Thermal annealing enhances creation of strong covalent bonds (-C-O-C-) changed from hydrogen bonds. (c) 2010 Elsevier B.V. All rights reserved.