Yunlong LI: "Production of Large-Diameter Uniform Plasma by Modified Magnetron-Typed RF Discharge" Proc. of 3rd Inter. Conf. on Reactive Plasmas and 14th Sympo. Plasma Processing. AP971204. 211-212 (1997)
Yunlong LI: "Production of Large-Diameter Uniform Plasma by Modified Magnetron-Typed RF Discharge" Proc. of 3rd Inter. Conf. on Reactive Plasmas and 14th Sympo. Plasma Processing. AP971204. 211-212 (1997)
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李云龙:“改进磁控管型射频放电生产大直径均匀等离子体”,论文集:2017年
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