Influence of growth temperature on structure, optical and electrical properties of nickel oxide films by magnetron sputtering
Influence of growth temperature on structure, optical and electrical properties of nickel oxide films by magnetron sputtering
复制标题
生长温度对磁控溅射氧化镍薄膜结构、光学和电学性能的影响
DOI:
10.1016/j.vacuum.2018.02.026
复制
发表时间:
2018-02
期刊:
影响因子:
4
通讯作者:
Li Jingjie
中科院分区:
文献类型:
--
作者:
Zhao Yang;Wang Hui;Yang Fan;Zhen Zhiqiang;Li Xinzhong;Li Qiuze;Li Jingjie