Local Electrode Atom Probes
Local Electrode Atom Probes
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局部电极原子探针
DOI：
--
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发表时间：
1998
影响因子：
2.8
通讯作者：
P. Camus
中科院分区：
文献类型：
--
作者：
T. Kelly;P. Camus
需要改进。尽管原子探针技术具有令人印象深刻的原子尺度分析能力，但仍存在一些明确的改进需求。对于许多类型的材料，特别是技术上重要的薄膜材料来说，APFIM 样本的针形状是一种很难制造的几何形状。尽管 3DAP 比传统 AP 收集更多数据，但按照分析标准，分析量仍然很小：通常，大约 15 nm x 15 nm x 50 nm 的图像中的原子数量少于 100 万个。数据收集速率（每秒最多数十个原子）将分析体积的实际大小限制为约 100 万个原子。质量分辨率差使得很难在大约 20% 的样品光谱中分离出相似质荷比的离子。因此，需要改进三个主要领域：1) 样本几何形状，2) 数据收集率，以及 3) 质量分辨能力。
The Need for Improvements. Though atom probe techniques have impressive atomic-scale analytical capabilities, there are some definite needs for improvement. The needle shape of APFIM specimens is a difficult geometry to make for many types of materials, especially technologically important thin-film materials. Even though 3DAPs collect more data than traditional APs, the analysis volumes are still small by analytical standards: typically there are fewer than 1 million atoms in an image which is about 15nm x 15nm x 50nm. The data collection rate (up to tens of atoms per second) limits the practical size of analyzed volumes to about 1 million atoms. Poor mass resolution makes it difficult to separate ions of similar mass-to-charge ratio in spectra of approximately 20% of samples. Thus, there are three principal areas where improvements are desirable: 1) specimen geometry, 2) data collection rates, and 3) mass resolving power.