A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests
A soft-X-ray imaging microscope with a multilayer-coated Schwarzschild objective: Imaging tests
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DOI：
10.1143/jjap.39.1926
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发表时间：
2000-04-01
期刊：
影响因子：
--
通讯作者：
Watanabe, M
中科院分区：
文献类型：
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作者：
Toyoda, M;Shitani, Y;Watanabe, M
我们构建了一个基于多层涂层 Schwarzschild 物镜的软 X 射线成像显微镜。它根据多层涂层选择性反射的特征软 X 射线提供元素敏感图像。 Schwarzschild 物镜设计为具有 50 倍放大倍率和 0.25 的数值孔径。物镜的镜子涂有 Mo/Si 多层膜以反射 Si L. 发射。峰值波长为 13.3 nm 时，物镜的总通量为 14%。在1μA加速至2.5kV的电子束照射下观察5μm宽的光刻图案化SiO2条带。
We constructed a soft-X-ray imaging microscope based on a multilayer-coated Schwarzschild objective. It provides an element-sensitive image in terms of the characteristic soft X-rays selectively reflected by the multilayer coating. The Schwarzschild objective was designed to have a 50x magnification and a numerical aperture of 0.25, The mirrors of the objective were coated with Mo/Si multilayers to reflect the Si L. emission. The overall throughput of the objective was 14% at a peak wavelength of 13.3 nm. The 5-mu m-wide stripe of lithographically patterned SiO2 was observed under irradiation with an electron beam of 1 mu A accelerated to 2.5 kV.