Experimental evaluation of a spherical aberration-corrected TEM and STEM.
Experimental evaluation of a spherical aberration-corrected TEM and STEM.
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球面像差校正 TEM 和 STEM 的实验评估。
DOI：
10.1093/jmicro/dfi001
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
D. Cockayne
中科院分区：
文献类型：
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作者：
H. Sawada;T. Tomita;M. Naruse;T. Honda;Paul Hambridge;P. Hartel;M. Haider;C. Hetherington;R. Doole;A. Kirkland;J. Hutchison;J. Titchmarsh;D. Cockayne
我们成功开发了一种用于使用六极校正器的探针和成像系统的球差（Cs）校正电子显微镜。显微镜的性能进行了实验评估。使用成像Cs校正器获得的点分辨率优于0.12nm。对于扫描透射电子显微镜，使用探针形成Cs-校正器，Ronchigram平坦区域在半角中>40 mrad。
We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better than 0.12 nm. For scanning transmission electron microscopy, the Ronchigram flat area was >40 mrad in half-angle using the probe-forming Cs-corrector.