Electron Source Brightness and Illumination Semi-Angle Distribution Measurement in a Transmission Electron Microscope
Electron Source Brightness and Illumination Semi-Angle Distribution Measurement in a Transmission Electron Microscope
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DOI：
10.1017/s1431927618000223
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发表时间：
2018-06-01
影响因子：
2.8
通讯作者：
Kaiser, Ute
中科院分区：
文献类型：
--
作者：
Boerrnert, Felix;Renner, Julian;Kaiser, Ute
电子源亮度是电子显微镜的一个重要参数。可靠和简单的亮度测量方法并不容易找到，透射电子显微镜照明半角度分布的确定方法更是少之又少。在这里，我们报告了一个简单的测量路线，这两个实体，并证明它的国家的最先进的仪器。具有单色器的FEI X-FEG的降低的轴向亮度被确定为大于10（8）A/（m（2）sr V）。
The electron source brightness is an important parameter of an electron microscope. Reliable and easy brightness measurement routes are not easily found. A determination method for the illumination semi-angle distribution in transmission electron microscopy is even less well documented. Herein, we report a facile measurement route for both entities and demonstrate it on a state-of-the-art instrument. The reduced axial brightness of the FEI X-FEG with a monochromator was determined to be larger than 10(8) A/(m(2)sr V).