Preparations and tribological properties of soft-metal/DLC composite coatings by RF magnetron sputter using composite targets
Preparations and tribological properties of soft-metal/DLC composite coatings by RF magnetron sputter using composite targets
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DOI：
10.1007/s10999-017-9376-3
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发表时间：
2018-09-01
影响因子：
3.7
通讯作者：
Goto, Minoru
中科院分区：
文献类型：
--
作者：
Goto, Minoru
本文报道了采用同心复合靶（CCT）射频磁控溅射法制备的无氢DLC基体的Ag/DLC纳米复合涂层（RF-Ag-DLC）和Cu/DLC纳米复合涂层（RF-Cu-DLC）的特性和摩擦学性能。CCT由C基靶和金属片组成，并且金属片同心地位于基靶的中心，其中Ar离子的蚀刻速率极低。通过改变CCT中Ag片或Cu片的直径，制备了Ag含量为6 ~ 65 at.%的RF-Ag-DLC，和具有范围从7至75原子%的Cu浓度的RF-Cu-DLC可以制备。这些涂层显示出具有Ag或Cu纳米晶体的颗粒状结构，所述Ag或Cu纳米晶体的直径范围为5至10 nm，均匀地分散在无氢DLC基质中。DLC的摩擦系数随金属的种类和含量而变化。当摩擦副表面形成富金属摩擦膜时，摩擦系数的转变趋于稳定。
This work reports the characteristics and tribological properties of both Ag/DLC nanocomposite coatings (RF-Ag-DLC) and Cu/DLC nanocomposite coatings (RF-Cu-DLC) with hydrogen-free DLC matrix deposited by RF magnetron sputtering using a concentric composite target (CCT). The CCT consisted of a C base target and metal tablet, and the tablet was located on the center of the base target concentrically where the etching rate by Ar ions is extremely low. By changing the diameter of Ag or Cu tablets in CCT, RF-Ag-DLC with an Ag concentration ranging from 6 to 65 at.% and RF-Cu-DLC with Cu concentration ranging from 7 to 75 at.% can be prepared. These coatings show a granular structure having Ag or Cu nano-crystals with a diameter ranging from 5 to 10 nm dispersed homogeneously in the hydrogen-free DLC matrix. The friction coefficient of DLC varied depending on the species and content of metal. The transition of the friction coefficient became stable when metal-rich tribofilms formed on the counterfaces.